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Saturday, December 8, 2012

MF3016 MICRO MACHINING PROCESSES SYLLABUS | ANNA UNIVERSITY BE MATERIALS SCIENCE AND ENGINEERING 8TH SEMESTER SYLLABUS REGULATION 2008 2011 2012-2013

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MF3016 MICRO MACHINING PROCESSES SYLLABUS | ANNA UNIVERSITY BE MATERIALS SCIENCE AND ENGINEERING 8TH SEMESTER SYLLABUS REGULATION 2008 2011 2012-2013 BELOW IS THE ANNA UNIVERSITY 8TH SEMESTER B.E MATERIALS SCIENCE ENGINEERING DEPARTMENT SYLLABUS, TEXTBOOKS, REFERENCE BOOKS,EXAM PORTIONS,QUESTION BANK,PREVIOUS YEAR QUESTION PAPERS,MODEL QUESTION PAPERS, CLASS NOTES, IMPORTANT 2 MARKS, 8 MARKS, 16 MARKS TOPICS. IT IS APPLICABLE FOR ALL STUDENTS ADMITTED IN THE YEAR 2011 2012-2013 (ANNA UNIVERSITY CHENNAI,TRICHY,MADURAI, TIRUNELVELI,COIMBATORE), 2008 REGULATION OF ANNA UNIVERSITY CHENNAI AND STUDENTS ADMITTED IN ANNA UNIVERSITY CHENNAI DURING 2009

MF3016 MICRO MACHINING PROCESSES L T P C
3 0 0 3 AIM
The purpose of this subject is understand the principles of various micro fabrication
processes.
OBJECTIVES
 Upon completion of this subject, student will be able to:
 Understand principle of micro systems and feed back systems
 Know the different methods of microfabrication.
 Understand the properties and microstructure of materials
 Appreciate Integration processes in detail
 Enhance the knowledge in semiconductor manufacturing processes.
UNIT I INTRODUCTION 8
Introduction to Micro System design, Material properties, micro fabrication technologies.
Structural behavior, sensing methods, micro scale transport - feed back systems.
UNIT II MICROMECHANICS 9
Microstructure of materials, its connection to molecular structure and its consequences
on macroscopic properties – Phase transformations in crystalline solids including
martensite, ferroelectric, and diffusional phase transformations, twinning and domain
patterns, smart materials
UNIT III BASIC MICRO-FABRICATION 10
Bulk Processes – Surface Processes – Sacrificial Processes and Bonding Processes–
Special machining: Laser beam micro machining – Electrical Discharge Machining –
Ultrasonic Machining – Electro chemical Machining. Electron beam machining.
UNIT IV MECHANICAL MICROMACHINING 10
Theory of micromachining – Chip formation – Size effect in micromachining –
microturning, micromilling, microdrilling - Micromachining tool design – Precision
Grinding – Partial ductile mode grinding – Ultraprecision grinding – Binderless wheel –
Free form optics.
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UNIT V SEMI CONDUCTORS MANUFACTURING 8
Basic requirements - clean room – yield model – Wafer IC manufacturing – feature micro
fabrication technologies – PSM – IC industry – New Materials – Bonding and layer
transfer – devices – micro fabrication industries.
TOTAL : 45 PERIODS
TEXT BOOK:
1. Sami Franssile, “Introduction to Micro Fabrication”, John Wiley & Sons Ltd., UK,
2004
REFERENCES:
1. Madore Mar J., “Fundamental of Micro Fabrication”, CRC Press, 2002
2. Robert W Johnstone and Ash Parmaswaran, “An Introduction to Surfacemicromachining”,
Springer, 1st edition, 2004.
3. Rai Choudhury, P., “ Handbook of Microlithography, Micromachining, and
Microfabrication”. Volume 2: Micromachining and Microfabrication, SPIEInternational
Society for Optical Engine, 1997.

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