MF3010 MICRO MACHINING PROCESSES SYLLABUS | ANNA UNIVERSITY BE MANUFACTURING ENGINEERING 8TH SEMESTER SYLLABUS REGULATION 2008 2011 2012-2013 BELOW IS THE ANNA UNIVERSITY 8TH SEMESTER B.E MANUFACTURING ENGINEERING DEPARTMENT SYLLABUS, TEXTBOOKS, REFERENCE BOOKS,EXAM PORTIONS,QUESTION BANK,PREVIOUS YEAR QUESTION PAPERS,MODEL QUESTION PAPERS, CLASS NOTES, IMPORTANT 2 MARKS, 8 MARKS, 16 MARKS TOPICS. IT IS APPLICABLE FOR ALL STUDENTS ADMITTED IN THE YEAR 2011 2012-2013 (ANNA UNIVERSITY CHENNAI,TRICHY,MADURAI, TIRUNELVELI,COIMBATORE), 2008 REGULATION OF ANNA UNIVERSITY CHENNAI AND STUDENTS ADMITTED IN ANNA UNIVERSITY CHENNAI DURING 2009
MF3010 MICRO MACHINING PROCESSES LT P C
3 0 0 3
AIM:
The purpose of this subject is understand the principles of various micro fabrication
processes.
OBJECTIVES:
Upon completion of this subject, student will be able to:
Understand principle of microsystems and feed back systems
Know the different methods of microfabrication.
Understand the properties and microstructure of materials
Appreciate Integration processes in detail
Enhance his knowledge in semiconductor manufacturing processes.
UNIT I INTRODUCTION 8
Introduction to Micro System design, Material properties, micro fabrication technologies.
Structural behavior, sensing methods, micro scale transport - feed back systems.
UNIT II MICROMECHANICS 9
Microstructure of materials, its connection to molecular structure and its consequences
on macroscopic properties – Phase transformations in crystalline solids including
martensite, ferroelectric, and diffusional phase transformations, twinning and domain
patterns, smart materials
UNIT III BASIC MICRO-FABRICATION 10
Bulk Processes – Surface Processes – Sacrificial Processes and Bonding Processes–
Special machining: Laser beam micro machining – Electrical Discharge Machining –
Ultrasonic Machining – Electro chemical Machining. Electron beam machining.
UNIT IV MECHANICAL MICROMACHINING 10
Theory of micromachining – Chip formation – Size effect in micromachining –
microturning, micromilling, microdrilling - Micromachining tool design – Precision
Grinding – Partial ductile mode grinding – Ultraprecision grinding – Binderless wheel –
Free form optics.
UNIT V SEMI CONDUCTORS MANUFACTURING 8
Basic requirements - clean room – yield model – Wafer IC manufacturing – feature micro
fabrication technologies – PSM – IC industry – New Materials – Bonding and layer
transfer – devices – micro fabrication industries.
TOTAL : 45 PERIODS
TEXT BOOK
1. Sami Franssila, “Introduction to Micro Fabrication”, John Wiley and sons Ltd., UK,
2004, ISBN: 978-0-470-85106-7
REFERENCES
1. Madore J, “Fundamental of Micro Fabrication”, CRC Press, 2002
2. Mark J. Jackson, “Microfabrication and Nanomanufacturing”, CRC Press, 2006
3. Peter Van Zant, “Microchip fabrication”, McGraw Hill, 2004
4. Mohamed Gad-el-Hak, “The MEMS Handbook”, CRC Press, 2006
MF3010 MICRO MACHINING PROCESSES LT P C
3 0 0 3
AIM:
The purpose of this subject is understand the principles of various micro fabrication
processes.
OBJECTIVES:
Upon completion of this subject, student will be able to:
Understand principle of microsystems and feed back systems
Know the different methods of microfabrication.
Understand the properties and microstructure of materials
Appreciate Integration processes in detail
Enhance his knowledge in semiconductor manufacturing processes.
UNIT I INTRODUCTION 8
Introduction to Micro System design, Material properties, micro fabrication technologies.
Structural behavior, sensing methods, micro scale transport - feed back systems.
UNIT II MICROMECHANICS 9
Microstructure of materials, its connection to molecular structure and its consequences
on macroscopic properties – Phase transformations in crystalline solids including
martensite, ferroelectric, and diffusional phase transformations, twinning and domain
patterns, smart materials
UNIT III BASIC MICRO-FABRICATION 10
Bulk Processes – Surface Processes – Sacrificial Processes and Bonding Processes–
Special machining: Laser beam micro machining – Electrical Discharge Machining –
Ultrasonic Machining – Electro chemical Machining. Electron beam machining.
UNIT IV MECHANICAL MICROMACHINING 10
Theory of micromachining – Chip formation – Size effect in micromachining –
microturning, micromilling, microdrilling - Micromachining tool design – Precision
Grinding – Partial ductile mode grinding – Ultraprecision grinding – Binderless wheel –
Free form optics.
UNIT V SEMI CONDUCTORS MANUFACTURING 8
Basic requirements - clean room – yield model – Wafer IC manufacturing – feature micro
fabrication technologies – PSM – IC industry – New Materials – Bonding and layer
transfer – devices – micro fabrication industries.
TOTAL : 45 PERIODS
TEXT BOOK
1. Sami Franssila, “Introduction to Micro Fabrication”, John Wiley and sons Ltd., UK,
2004, ISBN: 978-0-470-85106-7
REFERENCES
1. Madore J, “Fundamental of Micro Fabrication”, CRC Press, 2002
2. Mark J. Jackson, “Microfabrication and Nanomanufacturing”, CRC Press, 2006
3. Peter Van Zant, “Microchip fabrication”, McGraw Hill, 2004
4. Mohamed Gad-el-Hak, “The MEMS Handbook”, CRC Press, 2006
No comments:
Post a Comment
Any doubt ??? Just throw it Here...